drie
								
		
						
			abbr.
							deep reactive ion etching 深反应离子蚀刻;
					
				
		
		
				例句:
		
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				Sight so deform what heart of rock could long Drie-ey'd behold?
								
								来自Milton			 
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				The micro - actuators are fabricated by use of DRIE on SOI wafer.
								
				本文中的微执行器采用深层反应离子刻蚀(DRIE)技术在硅隔离衬底(SOI)硅片上制作.
							 
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				The rooting effect of the structure in deep reactive ion etching ( DRIE ) process was investigated.
								
				给出了加速度计的制作工艺流程,研究了解决深 反应离子刻蚀 过程中的过刻蚀现象的方法.